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MEMSnet Home: MEMS-Talk: Deposit CVD oxide on Pyrex substrate
Deposit CVD oxide on Pyrex substrate
2003-08-19
A.K.Ismail
2003-08-20
Mighty Platypus
Deposit CVD oxide on Pyrex substrate
A.K.Ismail
2003-08-19
Dear all,

Does anybody know if a low temperature CVD oxide (i.e LPCVD or PECVD) can be
deposited on Pyrex substrate?. I would like to know if this CVD oxide can have
a good adhesion to pyrex. I found in literature almost people deposited CVD
oxide on Si substrate. I am expecting that it can have a good adhesion since
pyrex is also an oxide. Could anyone who has experience about this process can
confirm to me.

Thank you.

A.K.Ismail.



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