Dear all,
Does anybody know if a low temperature CVD oxide (i.e LPCVD or PECVD) can be
deposited on Pyrex substrate?. I would like to know if this CVD oxide can have
a good adhesion to pyrex. I found in literature almost people deposited CVD
oxide on Si substrate. I am expecting that it can have a good adhesion since
pyrex is also an oxide. Could anyone who has experience about this process can
confirm to me.
Thank you.
A.K.Ismail.