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MEMSnet Home: MEMS-Talk: hole on Al layer.
hole on Al layer.
2003-08-21
hengcw
hole on Al layer.
hengcw
2003-08-21
Hi,

i have deposit a Al layer on glass by using evaporate method. The problem
is, i get many hole at the Al surface. These holes cause the thickness of
Al layer not uniform. Have anybody face this problem before? What factor
cause this happen and what is the solution? Any suggestion and advice are
very appreciated. Thanks.

Best regards,
C.W. Heng

Institute of Micro Engineering and Nanoelectronics,
UKM, Malaysia.



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