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MEMSnet Home: MEMS-Talk: Re: measuring force/deflection relations in MEMS
Re: measuring force/deflection relations in MEMS
1995-09-20
[email protected]
1995-09-20
Albert K. Henning
1995-09-21
[email protected]
1995-09-22
Bill Lapson
Re: measuring force/deflection relations in MEMS
[email protected]
1995-09-20
you may try to use piezoelectric bimorphs, they have a linear relation between
applied voltage and force, or deflection.

Jan Smits

Assoc Prof.

Boston University


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