Changping,

I use 8sccm Ar 1.6 sccm BCl3 @ 40 watts in a RIE.  I keep my chamber
pressure below 5mT.
There is a secret.  You need to pump on the AlGaAs sample a few hours
and your system can
have no air leaks.  If you have an air leak your AlGaAs will etch very
slow and leave a dark residue.

Brent

Changping wrote:

>
  Hi, Can anyone suggest a dry etch recipe of AlGaAs/GaAs DBR mirror?
  What gases are needed? Thanks!  Changping

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