Chrome is often used as an adhesion layer for Gold.  I recently used
Cr/Pt/Au on Silicon Nitride on Si, which was bonded to Cr/Pt/Au on Pyrex.  I
was surprised to find adhesion failures between the Cr and the Silicon
Nitride (I usually have problems with getting things to stick to Pyrex).
Next time I will try oxidizing the surface of the Silicon Nitride before
depositing the metal in attempt to improve adhesion.

Roger Shile



----- Original Message -----
From: "Nikhil Mehta" 
To: 
Sent: Sunday, August 24, 2003 1:30 PM
Subject: [mems-talk] coating on Silicon Nitride to deposit Gold


> hi:
> We at present are do a titanium coating on Silicon Nitride on which we
deposit Gold (as gold does not stick to Nitride). I am looking for
literature to find if we can replace titanium with any other material on
which we can deposit Gold and at the same time this material is not
sensitive to KOH etching (Titanium is sensitive to KOH etching).
>
> I tried to find some literature on this but no success. Can any one help
me in my dilemma
>
> thanks
>
> Nick
> Graduate Student
> Auburn University
>
>
>
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