Hi Nick,

Knighton is right, Au will never stick to Ti when use as seedlayer, I
myself have try before. use Cr/Au as seedlayer. but if you have to use Ti
as seedlayer then you have to plate a very thin layer of Ni onto Ti then Au
will stick to it.

good luck,

AJ Pang

On Mon, 25 Aug 2003 14:34:24 -0400, "Knighton, Ed" 
wrote:

>       Hi Nick,
>       I think a very thin later of chromium will work, chrome sticks to
> every thing and gold  sticks to the chromium very well.
>
>       Ed Knighton, Process Engineer
>       Constellation Tech.Inc.
>
> > -----Original Message-----
> > From:       Nikhil Mehta [SMTP:[email protected]]
> > Sent:       Sunday, August 24, 2003 4:30 PM
> > To: [email protected]
> > Subject:    [mems-talk] coating on Silicon Nitride to deposit Gold
> >
> > hi:
> > We at present are do a titanium coating on Silicon Nitride on
> which we
> > deposit Gold (as gold does not stick to Nitride). I am looking
> for
> > literature to find if we can replace titanium with any other
> material on
> > which we can deposit Gold and at the same time this material is
> not
> > sensitive to KOH etching (Titanium is sensitive to KOH etching).
>
> >
> > I tried to find some literature on this but no success. Can any
> one help
> > me in my dilemma
> >
> > thanks
> >
> > Nick
> > Graduate Student
> > Auburn University
> >
> >
> >
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