Randy,

The spay coating process mentioned previously (ultrasonic, by EVG, rather than
electro-spray) has been used to successfully conformally coat with PMMA. Other
than that, I'm not sure as to an effective method to produce the thin film you
are looking for in a conformal coat.

Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   Randy Grow [mailto:[email protected]]
Sent:   Tuesday, August 26, 2003 8:41 AM
To:     [email protected]
Subject:        Re: [mems-talk] Electrodes in Microchannel

Does anyone have a recommendation for a conformal layer of PMMA? I have
8 micron steps that have been difficult to cover. I have succeeded with
a  bilayer of PMMA, each layer being 1.6 microns, for a total of 3.2
microns. At that thickness, though, ebeam lithography becomes very
difficult.

Thanks,

Randy Grow
Ph.D. Candidate
Dept. of Applied Physics
Stanford University


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