Dear All,

We are looking a product for planarization process i.e a spin on glass
(SOG) material which can direct sustitute for LTO, TEOS or CVD oxide,
non-etch back application (permanent dielectric layer), low curing temperature
(<400 deg celcius), has a good adhesion to pyrex, Si, SiO2 or metal (gold, Pt
etc.). We also would like to know the method/material/etchant for patterning
this type of SOG.

If anybody know which company sell/supply this type of SOG, please send the
contact details to us.

Thank you in advance.

Kind regards,

A.K.Ismail