Ramji,

Here are some references I've found useful:

"A Microfabricated Amperometric Moisture Sensor," X. Su, X. Xingguo, T.
Dallas, S. Gangopadhyay, H. Temkin, X. Wang, R. Walulu, J. Li, and P.
Dasgupta, Talanta 56, 309-321 (2002).
G. J. Maclay, D. Keyvani, and S. B. Lee, "Microfabricated Amperometric
Electochemical Sensors for Gas Detection," Electrochemical Society
Proceedings 95-27, pp. 177-187 (1995).
Y. Ren, P. Mormile, L. Petti, and G. Cross, "Optical waveguide humidity
sensor with symmetric multiplayer configuration," Sensors and Actuators B
75, pp. 76-82 (2001).
P. Innocenzi, A. Martucci, M. Guglielmi, A. Bearzotti, and E. Traversa,
"Electrical and structural characterization of mesoporous silica thin films
as humidity sensors," Sensors and Actuators B 76, pp. 299-303 (2001).
A. Bearzotti, I. Fratoddi, L. Palummo, S. Petrocco, A. Furlani, C.L. Sterzo,
M. V. Russo, "Highly ethynlated polymers: synthesis and applications for
humidity sensors," Sensors and Actuators B 76, pp. 316-321 (2001).
S. Park, J. Kang, J. Park, S. Mun, "One-bodied humidity and temperature
sensor having advanced linearity at low and high relative humidity range,"
Sensors and Actuators B 76, pp. 322-326 (2001).
M.S. Gong, M.H. Lee, and H.W. Rhee, "Humidity sensor using cross-linked
copolymers," Sensors and Actuators B 73, pp. 185-191 (2001).
C.W. Lee, H.W. Rhee, and M.S. Gong, "Humidity sensor using epoxy resin
containing quaternary ammonium salts," Sensors and Actuators B 73, pp.
124-129 (2001).

--Tim

Tim Dallas, Ph.D.
Assistant Professor of Electrical and Computer Engineering
Texas Tech University
Lubbock, TX 79409-3102
806-742-4753 (O)
806-742-1245 (F)

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Message: 5
Date: Wed, 27 Aug 2003 11:05:01 -0700 (PDT)
From: ramji dhakal 
Subject: [mems-talk] Humidity sensors in MEMS
To: General MEMS discussion 
Message-ID: <[email protected]>
Content-Type: text/plain; charset=us-ascii

Hi all,

I would be highly obliged if anyone could forward me
some information about MEMS level humidity sensors.
Could anyone please suggest me a technical paper or
forward me some suggestions?

Thanks and regards.
Ramji

=====
Ramji Dhakal

M S Mechanical Engineering,
SUNY Binghamton, NY

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