Hy Li Wang
We have the same Maskaligner and we do use sometimes similar
transparency on glass
masks. If we have this vacuum loss, we try another glass or we try to
turn the glas
upside down. Some or our 5" glass plates do not work at all. (Maybe
scratches or
surface is not flat enough.)
So just try another glass plate.

Greetings
Stefan


-----Original Message-----
From: Li Wang [mailto:[email protected]]
Sent: Dienstag, 26. August 2003 23:43
To: [email protected]
Subject: [mems-talk] problem with the mask aligner


Hi everyone,

I met a problem when I use the mask aligner. The aligner is Karl Suss
MA6.
It's pretty new one. The mask is a glass plate with transparency sheet
on.
The problem is that I can't hold the mask. It always say that mask
vacuum
is off. I checked the pipe and connection and they are sealed well. The
only problem is the sealing between the mask and chunk. I tried to press

the mask but still had the same problem. It seems the chunk design  from

the manufacturer has some problem. But I doubt it. Are there anyone who
had
this kind of problem before?

Thanks

Li Wang
Carnegie Mellon University
412-2682514




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