Thermal coefficient of expansion on SI vs orienta
tion
St.Clair, Loren
2003-08-29
No there is not
Loren St. Clair
-----Original Message-----
From: Kenneth Smith [mailto:[email protected]]
Sent: Thursday, August 28, 2003 5:42 PM
To: General MEMS discussion
Subject: [mems-talk] Thermal coefficient of expansion on SI vs
orientation
Thermal coefficient of expansion on SI vs orientation
Might anyone know if there are any different Coefficients of expansion
on silicon for 1-0-0 , versus 1-1-1 versus 1-1-0 ? and does resistivity
or dopant have a play in this at all ?
Regards,.
Ken
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