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MEMSnet Home: MEMS-Talk: Imaging Glass on E-Sem
Imaging Glass on E-Sem
2003-08-29
Husein Rokadia
Imaging Glass on E-Sem
Husein Rokadia
2003-08-29
Hi Guys,

I need some help with imaging electrodes on a Glass substarte in an E-SEM.

I have been using the Envoirmental mode on the SEM because Glass is not a
conductor, but to no avail.

We have tried sputtering a thin layer of 'Au' on the substrate alongwith the
'high Vaccum' mode on the SEM but the glass substrate gets charged up and the
picture distorts.

One of the papers that I read suggested the sputtering of 'Os'. I am not sure
if this will help either.

Thanks in adavance,

Sincerely,

Husein Rokadia

Husein Rokadia
University of Arkansas,
MEEG Rm 223,
O:479-575-6821
R:479-871-0033
Lab:479-575-4150


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