Ken,

Here is an article from Virginia Semiconductor that would serve as a good
reference, I think.
http://www.virginiasemi.com/pdf/Basic%20Mechanical%20and%20Thermal%20Propert
ies%20of%20Silicon.pdf

Regards,

Mike Barger

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf
Of Kenneth Smith
Sent: Thursday, August 28, 2003 6:42 PM
To: General MEMS discussion
Subject: [mems-talk] Thermal coefficient of expansion on SI vs
orientation


Thermal coefficient of expansion on SI vs orientation

Might anyone know if there are any different Coefficients of expansion
on silicon for 1-0-0 , versus 1-1-1 versus 1-1-0 ? and does resistivity
or dopant have a play in this at all ?

Regards,.
Ken
--


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