Hi,friends,

We're now planning to build a State Key Laboratory of Microelectronical Sensors,
so we'd like to buy equipments to develop and fabricate silicon microsensors,
e.g. silicon microelectronical pressure sensors and accelerometers in automotive
application. We would like to know which equipments are the most essential in
fabricating silicon microsensors and which companies to provid the equipments.
Does anyone have the experience? Does anyone tell me the names, addresses and
emails of these companies? Your help will be greatly appreciated.

Regards

Ruan Aiwu