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MEMSnet Home: MEMS-Talk: mass spectrometer for RIE end point detection
mass spectrometer for RIE end point detection
2003-08-30
Harry Tibbals
mass spectrometer for RIE end point detection
Harry Tibbals
2003-08-30
I was not able to locate Lightwind with internet searches.  Do you have
a contact address or website?

Thanks



H. F. Tibbals, Ph.D.
Director
Bioinstrumentation Resource Center
University of Texas Southwestern Medical Center
5323 Harry Hines Blvd MC 9025
Dallas, Texas 75390-9025
Tel. 214-648-3316
Fax. 214-648-5618
email: [email protected]

>>> [email protected] 6/27/03 1:34:34 PM >>>
You can contact Rick Hazard at a company called Lightwind. They make a
nice plasma spectrometer that I use on our systems. In addition, they
make an option where you can look at the spectra of the exhaust and be
able to see endpoint on <1% exposed areas like with vias. HIs phone
number is 925-890-0320. Tell him Bob Henderson referred you. Bob

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