Have you considered a polyimide? We used to process on 0.005" (127
micron) thick Kapton from DuPont.

-Mike

>>> [email protected] 08/29/03 6:57 PM >>>
Hello Everyone,

I am new to playing with SU-8. Rather than spin coat and process on
silicon I wish to replace the silicon wafer with a plastic substrate to
which the SU-8. Compatibility of the SU-8 with the plastic requires
that:
1        The resist must adhere to the plastic
2      Solvent in SU-8  and developer must not swell or dissolve the
plastic
3    Plastic should expand and contract isotropically during the baking
and cooling processes with a similar thermal expansion coefficient to
the SU-8 (polymerised.

Does anyone out there have any suggestions about a suitable plastic ?
If you do and it is them my life gets easier.

Many thanks to you all.

Bob
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