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MEMSnet Home: MEMS-Talk: Ni diffusion on Au under 800C
Ni diffusion on Au under 800C
2003-09-06
[email protected]
2003-09-08
David Ovrokzky
2003-09-08
sooje cho
2003-09-18
[email protected]
Ni diffusion on Au under 800C
David Ovrokzky
2003-09-08
Benny,
What is the percent of P electroless Ni you use?
You can check solutions of electroless Ni with different percent of phosphor
(mid, low and high).
Enthone has all the kinds. Theoretically, the layer with the higher P
content should be better diffusion barrier.

David

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
[email protected]
Sent: Saturday, September 06, 2003 4:33 AM
To: [email protected]
Subject: [mems-talk] Ni diffusion on Au under 800C


I'm now working for a MEMS devices which work under 600 C. 2 microns
electroless Ni and 2 microns Au are plated on Cu substrate. Some white
spots is observed after 600 C thermal testing. I guess that would be due to
metal diffusion. Would profession suggest a better diffusion barrier rather
than Ni?

Benny Hong



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