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MEMSnet Home: MEMS-Talk: Al etch
Al etch
2003-09-09
Sagi Daren
2003-09-09
Kirt & Erika Zipf-Williams
2003-09-10
transene
Al etch
Sagi Daren
2003-09-09
Hi All
I am looking for an Aluminum etchant which is highly selective for
Nickel/Titanium films which lay beneath.
Have tried some NaOH solutions but they didn't do the work.
Thank you all for your help
  S. Daren

      Sagi Daren
Senior R&D Engineer
 El-Mul Technologies
Tel.:972-8-9434184 #43
[email protected]



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