Hi,friends,

We're now planning to build a State Key Laboratory of
Microelectronical Sensors, so we'd like to buy equipments to develop
and fabricate silicon microsensors, e.g. silicon microelectronical
pressure sensors and accelerometers in automotive application. We
would like to know which equipments are the most essential in
fabricating silicon microsensors and which companies to provid the
equipments. Does anyone have the experience? Does anyone tell me the
names, addresses and emails of these companies? Your help will be
greatly appreciated.

Regards

Ruan Aiwu