Hello Dr. Bondavalli,
if I understand your question correctly you might try Imprint Patterning, a way
to pattern holes and channels at the same time, in thermoplastics (& thermosets,
etc.). No photoresists required. If you are going submicron it's nanoimprinting.
Much public info. is available on the Web, I'm sending you some of it
separately.
Regards, George Gregoire, Pres., Dimensional Circuits Corp.
[email protected]
"Dimensional Circuits Corp. is the developer of IMPRINT Patterning technology, a
new and advantageous method of forming advanced circuitry"

------------------------------------------------------------------------------
  ----- Original Message ----- From: Paolo Bondavalli To: [email protected]
Sent: Wednesday, September 10, 2003 9:09 AM Subject: [mems-talk] Thermoplastic
and photopatternable resin


  Hi all MEMS experts,        I'd like to know if a photopatternable and
thermoplastic resin exists.    Bye.
  *********************************************************
  Dr. Paolo Bondavalli    R&D Engineer    MICROTEC MEMS    THALES (ex THOMSON-
CSF) CORPORATE RESEARCH CENTER    Domaine de Corbeville,    Route Departementale
128    F91404 ORSAY
  (FRANCE)    Tel : 01 69 33 08 63    Fax : 01 69 33 08 62    Email :
[email protected]
  **********************************************************