To plate, you need a seed layer that is:
(1) reasonably conductive for good uniformity across the wafer (1000 A of
gold is typical), and
(2) has a pure metal--not oxide--surface. Chromium oxidizes immediately upon
contact with room air.
You're probably asking because when you strip the seed layer, you also lose
some of the plated gold.
An alternative is to use nickel as the seed layer, stripping the oxide
immediately before plating.
--Kirt Williams, Ph.D. consultant
----- Original Message -----
From: Husein Rokadia
To:
Sent: Friday, September 12, 2003 9:10 AM
Subject: Re: [mems-talk] Electroplating Au on Chrome
>
> Hi!
> I have used evaporated Chrome-Gold as the seed layer to electroplate Au
and
> suceeded. I would like to know if it essential to have the Au layer on
the
> Chrome layer before I electroplate more Au?
>
> Thanx,
> Regards,
> Husein Rokadia
>
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