A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: TMAH etch Si
TMAH etch Si
2003-09-15
梁 迪
2003-09-19
kris
2003-09-20
Di Liang
Temperature sensing in MEMS
2003-09-22
ramji dhakal
TMAH etch Si
梁 迪
2003-09-15
Dear MEMSers,
I need to use TMAH etch Si for just 2-3 microns, but want to be as smooth
as possible.
Dose anyone know what the concentration and temperature is good for
processing?
I searched online and noticed some solution
is mixed with water and some with Methanol.What is the difference between
them?

By the way,is there any special concern about store and disposing it after
processing?
Thanks a lot!


DL

_________________________________________________________________
免费下载 MSN Explorer:   http://explorer.msn.com/lccn/


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
The Branford Group
Mentor Graphics Corporation