Aluminum Etch (phosphoric acid based) is good for etching Ni and won't
attack Si or SiO2..

Roger Shile

----- Original Message -----
From: "thierry.bouchet" 
To: "General MEMS discussion" 
Sent: Tuesday, September 16, 2003 9:47 AM
Subject: [mems-talk] etching Ni


> Hello,
>
> I would like to etch Ni without etching silicon and SIO2. Is there any
solution ?
>
> Regards
>
>
> Thierry Bouchet
> R&D engineer
> IBS
> Rue gaston Imbert prolongée
> tel: 04 42 53 89 64
> fax: 04 42 53 89 59
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