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MEMSnet Home: MEMS-Talk: Ag wet etch
Ag wet etch
2003-09-16
Edward Keough
2003-09-18
Peter Svasek
2003-09-18
transene
2003-09-19
Christian Sundermeier
2003-09-18
[email protected]
Ag wet etch
Peter Svasek
2003-09-18
Hi Edward,
We use a 40% (WT) solution of Fe(NO3)3 in H20 for etching evaporated
1...2 micrometer Ag layers.
We etch ca. 2 min for 1 micrometer at room temp.

I hope this helps
Peter

Vienna University of Technology
Institute of Industrial Electronics and
Material Science
Vienna
Austria


Edward Keough wrote:

>Does anyone have a recommendation for wet etching a 100nm layer of
>silver on a glass fiber. Through internet research I have only found a
>recipe that calls for NH4OH:H2O2 (1:1) @ room temp, but no etch rate or
>any other info. Does anyone have a recommendation. Thanks.
>
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