Hi all,

 I was wondering if any of you use any hot plate to bake PMMA for ebeam
lithography. Is there any difference with respect to conventional oven
baking in terms of quality of ebeam writing? Can you get the same
linewidth (I'm interested in sub 50 nm line)? And can any of you
recommend any particular hotplate? I've heard there are some which can
harden PMMA in 90 seconds.
Thank you very much

 Fabio