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MEMSnet Home: MEMS-Talk: Simulation software for anisotropic or isotropic etching for high aspect ratio Si towers
Simulation software for anisotropic or isotropic etching for high aspect ratio Si towers
2003-09-18
Srikanth Gopal
Simulation software for anisotropic or isotropic etching for highaspect ratio Si towers
2003-09-22
Rahul Saini
Looking for Distance Sensor...
2003-09-23
avi ariav
Simulation software for anisotropic or isotropic etching for high aspect ratio Si towers
Srikanth Gopal
2003-09-18
Hi all,

I am looking for a etching software to simulate etching process for high aspect
ratio Si structures (towers of Si with an oxide layer on top  ) which look like
the one shown below,



Bye,have fun
Srikanth.



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