Edward

The following recipes are search from "Etching in Microsystem Technology,
Wiley VCH"

Iodine-potassium iodide solution
KI              0.5 mol/l
I2              0.09 mol/l
rate:        ca. 300-1000 nm/s

Ammonia-methanoic hydrogen peroxide solution
NH3           1.4 mol/l
H2O2         1.5 mol/l
in ca. 67 vol% methanol in water
rate:             ca. 100 nm/s

Benny Hong