Hi,

May i know if u have any metallisation on ur chips??

Kris
--- Áº µÏ  wrote:
> Dear MEMSers,
> I need to use TMAH etch Si for just 2-3 microns, but
> want to be as smooth
> as possible.
> Dose anyone know what the concentration and
> temperature is good for
> processing?
> I searched online and noticed some solution
> is mixed with water and some with Methanol.What is
> the difference between
> them?
>
> By the way,is there any special concern about store
> and disposing it after
> processing?
> Thanks a lot!
>
>
> DL
>
>
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