----Original Message-----
From: thierry.bouchet
[mailto:[email protected]]
Sent: Tuesday, September 16, 2003 12:47 PM
To: General MEMS discussion
Subject: [mems-talk] etching Ni

Hello,
Hi Thierry,
sulphuric acid should etch nickel as well as the "mask
etching solution", which is the orange color liquid.
It is based on a NH4CeNO3. I think NH4 is in the
formula a few times as well as the NO3 group. Ask
somebody who has a "Handbook of metal etchants" to
open it and give you details.
Pavel


I would like to etch Ni without etching silicon and
SIO2. Is there any
solution ?

Regards


Thierry Bouchet
R&D engineer
IBS
Rue gaston Imbert prolongée
tel: 04 42 53 89 64
fax: 04 42 53 89 59



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