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MEMSnet Home: MEMS-Talk: Ag wet etch
Ag wet etch
2003-09-16
Edward Keough
2003-09-18
Peter Svasek
2003-09-18
transene
2003-09-19
Christian Sundermeier
2003-09-18
[email protected]
Ag wet etch
Christian Sundermeier
2003-09-19
Hi Keough,
since some suggested etching solution have very high etch rates, you
should try the following:
10 g potassiumbichromate(K2Cr2O7)
+ 50 g sodiumbisulphate (NaHSO4)
+ water to make 1 litre.
This one etches about 10 nm / sec at RT and is very gentle to
Photoresist!!!(in contrast to NH4OH/H2O2) Use agitation..No Bubbles. Low
underetch.
The only disadvantage might be the waste disposal because off the K2Cr2O7.


Best regards,
Christian Sundermeier

Edward Keough schrieb:

 >Does anyone have a recommendation for wet etching a 100nm layer of
 >silver on a glass fiber. Through internet research I have only found a
 >recipe that calls for NH4OH:H2O2 (1:1) @ room temp, but no etch rate or
 >any other info. Does anyone have a recommendation. Thanks.
 >
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