Hello Kris,
There is no any metallisation on my chips. I just want to know the density
of TMAH I should use
(shallow Si etch 2-3 micron, as smooth as possible), and where I can buy it
in a cheap price.
By the way, why people add some Methanol into TMAH?
Thanks a lot!



DL
----- Original Message -----
From: "kris" 
To: "General MEMS discussion" 
Sent: Friday, September 19, 2003 8:01 AM
Subject: Re: [mems-talk] TMAH etch Si


> Hi,
>
> May i know if u have any metallisation on ur chips??
>
> Kris
> --- A: 5O  wrote:
> > Dear MEMSers,
> > I need to use TMAH etch Si for just 2-3 microns, but
> > want to be as smooth
> > as possible.
> > Dose anyone know what the concentration and
> > temperature is good for
> > processing?
> > I searched online and noticed some solution
> > is mixed with water and some with Methanol.What is
> > the difference between
> > them?
> >
> > By the way,is there any special concern about store
> > and disposing it after
> > processing?
> > Thanks a lot!
> >
> >
> > DL
> >
> >
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