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MEMSnet Home: MEMS-Talk: BSG etch rate
BSG etch rate
2003-09-20
bobo
2003-09-22
transene
BSG etch rate
bobo
2003-09-20
hi everybody:
does anybody knows the etch rate of predeposition grown BSG in BHF or 10:1 HF?
regards
bobo
reply
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