MEMS Folk,

   I was wondering if there were any resources (Papers, books, FAQs,
course outline, etc) for teaching new users how to develop process flows
to make MEMS or similar devices. I operate an academic fab and we
constantly have to train people on how to develop the process flow to
make their device. What I mean by this is not teaching the individual
process steps, but how to put them together to make a device and
actually have the process work. There does not seem to be anything 'out
there' on how to do this. I would like to give the grad students a wider
view than my experience.

Also, are there any project management techniques out there that have
been developed for microfabrication? Best methods developed by the
microelectronics fabrication business?

Any suggestions or comments are very welcome. Please email me directly,
I do not monitor this email group that often (Sorry, but administration,
keeping the equipment running and teaching take all my time).

   Ken Westra
   NanoFab Director
   U of Alberta