--- Patrick G. Opdahl wrote:
Our research group has been investigating possible methods to measure and
 quantify the force / deflection behavior of some basic 2D MEMS structures.
 Most of us are ME's, so I was wondering if anyone could offer suggestions of
 how to apply a force to a microstructure and measure (accurately) the
 displacement or deflection of the device.
--- end of quoted material ---
If memory serves, John Bravman at Stanford, and folks at Oak Ridge Natl Lab
(sorry, I've forgotten the names), have done such work over the past ~6 years.

Al