Ryan,

My first thought is that the oxide from the aluminum is getting in the way.
Even for silicon-Pyrex anodic bonding, excessive oxide can block the bonding
process. With Aluminum, it is even worse, since Al forms oxide so quickly.

My best recommendation would be to perform an oxide removal immediately prior to
bonding.  For best results, you should also perform the bonding process itself
in reducing atmosphere (such as forming gas).


Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   [email protected] [mailto:[email protected]]
Sent:   Thursday, September 18, 2003 8:51 AM
To:     [email protected]
Subject:        [mems-talk] Al-pyrex anodic bonding

Hello all,
  i am interested in developing Al-pyrex anodic bonding.  I have performed
several experiments using thin film aluminum and pyrex glass and have been only
successful a few times.  i have not been able to make my process highly
repeatable. I would appreciate advice from anyone who has had experience with
this process.

Regards.
Ryan

Ryan D. Pooran
Ph.D Candidate Microelectronics-Photonics
Mechanical Engineering Department
University of Arkansas
Fayetteville, AR 72701
Ph:479-575-4150
Fax: 479-575-6982
e-mail: [email protected]


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