Hi Srikanth,

Zyvex has developed a software called MEMulator which accurately
emulates both isotropic and anisotropic etch. Additionally it supports
isotropic and anisotropic deposition, CMP, wafer bonding and
electroplating. The MEMulator has been licensed by Coventor and will be
available early October. Please contact them (www.coventor.com) to
obtain an evaluation.

Regards,
Rahul Saini
MEMS Engineer
Zyvex Corporation
[email protected]


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Srikanth Gopal
Sent: Thursday, September 18, 2003 12:21 PM
To: [email protected]
Subject: [mems-talk] Simulation software for anisotropic or isotropic
etching for highaspect ratio Si towers


Hi all,

I am looking for a etching software to simulate etching process for high
aspect ratio Si structures (towers of Si with an oxide layer on top  )
which look like the one shown below,



Bye,have fun
Srikanth.



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