Hi Marc,
        We did do deposition of Oxide in trenches of
the aspect ratio of 150-200. We maintained
temperatures of 800C and a mixture of dichlorosilane
and nitrous oxide gases was used. The deposion rate is
low but our application needed only thin oxides so we
used LPCVD to deposit oxide and the deposition was
conformal.
Regards,
 Murty Ravula.


__________________________________
Do you Yahoo!?
Yahoo! SiteBuilder - Free, easy-to-use web site design software
http://sitebuilder.yahoo.com