Dear All.
I deposited W and Mo on sputtered Ti/Au Layer, each.
Can anyone know dry or wet etchants which can etch W and Mo without etching
Ti/Au layer?
I tried H2SO4 and HF to do that. And they showed bad result.
Thank you in advance.
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AeroMEMS Laboratory.
School of Mechanical & Aerospace Engineering.
Seoul National University , Seoul , KOREA.
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