Hello,
we have problems with processing SU-8-50 and SU-8-10. We are using an I-Line-
Filters to provent negative sidewalls. With SU-8-50 (50µm thickness) we achieve
good results. With SU-8-10 (13µm thickness) we get the same negative sloped
sidewalls as without the filter.

Are there any differences in the chemical composition of the the two SU-8.

Has anyone experiences with using the I-Line-Filter.

We are searching for help...

Peter Molter