Khosla,

You need to be a bit more specific as to what your intentions are for these
materials.  Both of these materials have a wide range of application
capabilities.  AZP4620 is capable of producing coats in single layers in the
range of 5 - 33 um, with multi-layers going much thicker.  This allows
applications in surface and bulk micromachining, all the way up to wafer
bumping. SU-8 has an even greater range, with 2 um coats all the way up to 250
um (or perhaps more) possible, depending on grade of SU-8 used.

In each of these cases, the specific processing needs are going to depend on the
layer thickness and application desired.  Your best bet would be to first
contact the manufacturers of these materials:

AZP4620 - Clariant - AZ Electronic Materials (www.azresist.com)
SU-8 - MicroChem Corp. (www.microchem.com)

Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   Ramparsad Khosla [mailto:[email protected]]
Sent:   Tuesday, September 23, 2003 5:11 AM
To:     General MEMS discussion
Subject:        [mems-talk] PHOTORESIST

Hi

Can anyone help me get the proper parameters to working with photoresist
like AZP4620 and SU-8?

Thanks a lot

KHOSLA Vicky
NUS Undergrad

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