Peter,
I haven't worked with this resist or this thick of resist, but I would try
changing your focus. Best focus won't be the same for 50um of resist vs. 13um
of resist and it has a largest effect on sidewalls.

Robert


> Hello,
> we have problems with processing SU-8-50 and SU-8-10. We are using an
> I-Line-Filters to provent negative sidewalls. With SU-8-50 (50µm
> thickness) we achieve good results. With SU-8-10 (13µm thickness) we get
> the same negative sloped sidewalls as without the filter.
>
> Are there any differences in the chemical composition of the the two
> SU-8.
>
> Has anyone experiences with using the I-Line-Filter.
>
> We are searching for help...
>
> Peter Molter
> _______________________________________________