I have seen this happen with old SU-8. After I started storing my SU-8 in a
refrigerator the SU-8 would last much longer.

Another possibility, do you use contact or close proximity exposure?
If so try to use proximity exposure with the largest separation your lithography
allows.

Jacques Jonsmann




-----Original Message-----
From: pmolter [mailto:[email protected]]
Sent: 23. september 2003 10:38
To: [email protected]
Subject: [mems-talk] SU-8 with I-Line-Filter

Hello,
we have problems with processing SU-8-50 and SU-8-10. We are using an I-Line-
Filters to provent negative sidewalls. With SU-8-50 (50µm thickness) we achieve
good results. With SU-8-10 (13µm thickness) we get the same negative sloped
sidewalls as without the filter.

Are there any differences in the chemical composition of the the two SU-8.

Has anyone experiences with using the I-Line-Filter.

We are searching for help...

Peter Molter
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