Dear collegues,
please, help to find some systematic information on photoresist
materials (both, positive and negative). A listing of different resist
materials by wavelength used would be helpfull.
Are there resists available, sensitive in the visible spectrum too?
Thank you for assistance.
Stefan
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Fraunhofer-Institut fuer Dr. Stefan Fiedler
Zuverlaessigkeit u. Mikrointegration Telefon +49 (0) 30/46403-276
Gustav-Meyer-Allee 25 Telefax +49 (0) 30/46403-271
13355 Berlin e-mail [email protected]
Germany
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