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MEMSnet Home: MEMS-Talk: double sided photolithography
double sided photolithography
1997-11-14
Andreas Albrecht
double sided photolithography
Andreas Albrecht
1997-11-14
Dear colleagues
I'm looking for some information about development of the double sided
photolithography process in wafer technology.
Can anybody help me and give me some details about the beginnings, the
inventors and so on?

Yours sincerely

Andreas Albrecht
--
Transferzentrum Mikroelektronik e.V.
In den Weiden 7
D-99099 Erfurt
Tel. +49-(0)361-44 20 660       Fax +49-(0)361-44 20 666


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