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MEMSnet Home: MEMS-Talk: polysilicon grain size measurement
polysilicon grain size measurement
2003-09-30
Yilei Zhang
2003-10-01
Trisha Browne
polysilicon grain size measurement
Yilei Zhang
2003-09-30
Dear Members:
Is it possible to measure polysilicon grain size using XRD? It looks that only
qualitative results can be achieved. How to get quantitative results, for
example, 40nm?

If XRD cannot, any other methods? thanks.

Regards,
Yilei Zhang










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