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MEMSnet Home: MEMS-Talk: Re: polysilicon grain size measuremen
Re: polysilicon grain size measuremen
2003-10-01
Tom Rust
Re: polysilicon grain size measuremen
Tom Rust
2003-10-01
I would use an AFM - tapping mode will get you some topography - a
conductive probe will give you a better idea of the actual grain
boundaries. Use very sharp tips, tho (10nm radius of curvature or less),
and be prepared for them not to last very long (2 to 5 scan passes). We
have made long lasting conductive probes, but generally for our own use
only.

--
Tom Rust
Nanochip Inc
7700 Edgewater Dr., Suite 665
Oakland, CA 94621
(510) 339-6263
(510) 339-9636 FAX
(510) 912-4662 cell
http://www.nanochip.com








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