One suggestion: You should not break vacuum between Cr and Pt depostion.


-Mike

>>> [email protected] 10/01/03 9:00 PM >>>
currently im having problems getting a good contact
for gold layer with silicon coated with chromium as it
peel off easily.i deposited the gold layer using
e-beam evaporater and it started well but when i tried
to pick up the wafer, the gold layer deposited on it
seems to peel off very easily. Is there any way to
make a better contact for the gold layer and silicon
coated with chromium or will just annealing do the job
of making the gold layer stick better. Thankx

=====




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