Hello Sam:
IMT provides the services you describe. Please contact me as shown
below with more detail on the specifics, any diagrams you may have and
your volume requirements (single batch, continuous etc).
Best regards -Monte
Monteith G. Heaton
VP Marketing & Sales
innovative micro technology
"your strategic partner for MEMS manufacturing"
75 robin hill road | santa barbara, ca 93117
805-681-2852 | fx: 805-967-2677
[email protected] | www.imtmems.com
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Message: 6
Date: Wed, 1 Oct 2003 09:45:02 -0700
From: "Sam Beal"
Subject: [mems-talk] DRIE for through wafer openings
To:
Message-ID: <01ab01c3883b$5c8fecd0$6802a8c0@SamsVAIO>
Content-Type: text/plain; charset=3D"iso-8859-1"
Hi
I am lookng for DRIE services, preferrably in silicon valley.
I have an integrated circuit application requiring an array of large,
deep openings.
Specically I have 6" wafers. I would like to create an array of vias
300um (or more) deep. Each via is 400um (or more) diameter and a wafer
could contain 10,000 or more.
Sam Beal
JigSawtek
San Jose, CA
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