Hi,


I know that BHF/HF etches Titanium as a bulk, but what about thin (5 nm)
adhesion layer, between for example oxide and gold films (100 nm both)?
Someone (not so reliable source) told that it's so thin Ti-film, that
etchant won't be able to penetrate between the layers.
Does anyone have reliable data conserning this?

If I have BHF with promised SiO2 etch rate 100 nm/min (28 ml HF, 170 mn H2O,
113 g NH4F), what is the etch speed of Titanium?


Thanks,

Sampo Tuukkanen, University of Jyväskylä


----- Original Message -----
From: "Michael D Martin" 
To: 
Sent: Thursday, October 02, 2003 8:49 PM
Subject: Re: [mems-talk] Gold etchant and SiO2


> Yes, HF etches titanium.
>
>
>
> >>> [email protected] 10/02/03 7:37 AM >>>
> Hi,
>
> I would like to know if :
> - there is any incopatiblity between KI2 (Gold etch) and silicon
> dioxide, or B-HF and Gold.
> - there is any incompatibility between platinum/titanum and BHF.
>
> Thanks
>
> Delphine Meunier
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
>