Hello All

My name is Ahmed Shuja. I am a current student at the Univeristy of
Cincinnati. I am looking for a Recipe to try to grow 0.5-1um of Silicon
Nitride with ~100Mpa of residual stress. The recipe handed down to me was
for Stoichmetric Silicon Nitride. The film at 0.5um cracks and thay can be
seen with the nacked eye. I have wafers that I grew 0.75um that are
permenately bowed even after stripping the nitride.

DCS 25sccm
Ammonia 100sccm
Temp:700C
Pressure:300mTorr

I am mainly concerned with the resistance of silicon nitride to dilute HF
acid. I have found information that tends to show that low stress nitride is
usually grown by increasing the DCS flow rate. If anyone had a good recipe
that I can use I would really appreciate it.
Thanks

Ahmed Shuja
Center for MicroElectronics and MEMS
University of Cincinnati
ECECS Dept.

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